Modelling and simulation of MEMS electromagnetic scanner control

Abstract

The article presents the design, modelling and simulation of an electronic control solution for a MEMS electromagnetic scanning system. The electromechanical design is presented and completed with a mathematical model, and a simulation based on Comsol. The simulations allow to extract the equivalent circuit parameters of the actuator which in turn are used to integrate the equivalent circuit with the electronic circuit and simulate in PSPICE. The behavior of the overall circuit is simulated allowing to optimally design the electronic circuit. Current sources with Howland topology made with operational amplifiers are often used for electromagnetically actuators if that requires constant current polarization. Theoretical determination of overall performances for these circuits is generally known. This paper presents a PSPICE simulation for the mains performance of the constant current circuit used for actuators driving.