A Tunable RF MEMS Inductor

2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04) Pub Date : 2004-08-25 DOI:10.1109/ICMENS.2004.24

I. Zine-El-Abidine, M. Okoniewski, J. McRory

引用次数: 17

Abstract

This paper reports a single-wafer micromachined radio-frequency (RF) inductor that can be integrated in a convetional RFIC device. The Inductor achieved a quality factor greater than 9 at 15 GHz and a self-resonance frequency well above 15 GHz. The inductor is tunable and the inductance variation is greater than 8%.

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一种可调谐射频MEMS电感

本文报道了一种可以集成在传统射频器件中的单晶片微机械射频(RF)电感器。电感器在15 GHz时的质量因数大于9，自谐振频率远高于15 GHz。电感可调，电感变化量大于8%。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)

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