Junctions and Micromachines

Abstract

This paper discusses the opportunities for developing integrated microsystems through a combination of microelectronic and micromechanical devices together. A brief overview of the motivations and efforts towards this goal is provided. We then focus on the research within our group that has resulted in new findings and methods based on such integrated microsystems. These include the development of microsystems that utilized piezojunction and piezo-avalanche phenomena for sensing. We also provide examples of using microelectronic devices to do mechanical work.