Interferometric dimension comparator

Abstract

A new touchless interference method of length measurement is presented. A central interference fringe of polychromatic light is used to determine a reference distance. The method is based on comparison of two elements i.e. gauge blocks with one of them serving as a reference. The displacement of an interferometer reflector between the reference points related to the reference block and a measured gauge block is determined. The measurement of displacement and the detection of the gauge block positions were carried out within one optical axis. The presented measuring system is especially predestined as an extension to commercially available interferometers, making possible their application for a calibration procedure of gauge blocks.