Metal Enhanced Fluorescence Microarray Biochip using Glancing Angle Deposited Ag nanorods

Abstract

Glancing angle deposition (GLAD) is a physical vapor deposition process in which the substrate is placed to have a large incidence angle (>75°, angle between incoming flux and substrate normal). The GLAD process can be considered a promising method to fabricate metallic nanostructure on a large area at a low cost. GLAD Ag nanorods were fabricated and their fluorescence enhancement performances were examined. A practical antibody chip was realized using a 500 nm thick vertical Ag nanorods substrate. To overcome the limitations of GLAD Ag nanorod MEF substrate, Ag nanorods on micro post array substrate were also investigated.