Optical surface error analysis and compensation technique based on Zernike polynomial coefficients

Zelong Li, Chao-liang Guan, Yi-fan Dai, Jiahao Yong
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引用次数: 1

Abstract

Ultra-precision turning technology is widely used in the machining process of optical mirrors. Due to the influence of machine motion error, clamping error, tracking error and other factors, ultra-precision turning often deviates from the ideal position during the actual machining process. Various error factors are coupled with each other, and it is difficult to compensate by establishing an accurate error model at present. This paper proposes an optical surface error compensation method based on zernike polynomials. Firstly, the surface error is reconstructed with Zernike polynomials. Then, by analyzing the frequency distribution of the optical surface error, the error corresponding to a specific Zenick coefficient is selected. Finally, based on the fast tool servo system, the original machining path is corrected according to the error compensation strategy. By compensating a Φ100 mm mirror, the surface accuracy is improved from PV 1.83 μm, RMS 0.47 μm to PV 0.38 μm, RMS 0.04 μm. The experimental results show that the error compensation strategy proposed in this paper can significantly reduce the optical surface error and improve the machining accuracy.
基于泽尼克多项式系数的光学表面误差分析与补偿技术
超精密车削技术广泛应用于光学反射镜的加工过程中。由于机床运动误差、夹紧误差、跟踪误差等因素的影响,超精密车削在实际加工过程中往往会偏离理想位置。各种误差因素是相互耦合的,目前很难通过建立精确的误差模型进行补偿。提出了一种基于泽尼克多项式的光学表面误差补偿方法。首先,用Zernike多项式重构曲面误差;然后,通过分析光学表面误差的频率分布,选择特定泽尼克系数对应的误差。最后,基于快速刀具伺服系统,根据误差补偿策略对原加工路径进行修正。通过补偿Φ100 mm反射镜,将表面精度从PV 1.83 μm, RMS 0.47 μm提高到PV 0.38 μm, RMS 0.04 μm。实验结果表明,本文提出的误差补偿策略能显著降低光学表面误差,提高加工精度。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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