OPTIMIZED MEASUREMENT METHOD OF SMALL GAUGE LENGTH USING STEGER ALGORITHM

Y. Liu, H. Gao, Y. Cheng, Z. Wang, S. Sun
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Abstract

Described an measuring system for the use of gauge block measurement. Optical sources of the system is a highly stabilized laser with the wavelength of 532nm, and a 633nm wavelength laser of worse laser monochromaticity. For the use of interference graph capturing, a CCD sensor is introduced into the system. Fractional part of the interference fringes is calculated by image processing procedures. Gauge length is obtained by the interference fringe fraction coincident method. By applying Steger algorithm to extract by fringe centerline, fractional part of the interference fringe order can be accurately obtained. Highly accurate gauge length measurement in relatively simple experiment conditions can be realized with the system, as the demand on laser monochromaticity that interference fringe fraction coincidence method raises can be markedly decreased.
用steger算法优化了小量规长度测量方法
描述了一种用于量块测量的测量系统。该系统的光源为波长为532nm的高稳定激光器和波长为633nm的单色性较差的激光器。为了实现干涉图的捕获,系统中引入了CCD传感器。通过图像处理程序计算干涉条纹的分数部分。用干涉条纹分数重合法计算厚度。采用Steger算法对干涉条纹中心线进行提取,可以准确地获得干涉条纹阶数的小数部分。由于干涉条纹分数符合法对激光单色性的要求明显降低,该系统可以在相对简单的实验条件下实现高精度的量规长度测量。
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