{"title":"Low loss SiN photonic integrated circuits: from prototype to volume","authors":"M. Geiselmann","doi":"10.1117/12.2647172","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":128117,"journal":{"name":"Smart Photonic and Optoelectronic Integrated Circuits 2023","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-03-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Smart Photonic and Optoelectronic Integrated Circuits 2023","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2647172","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}