{"title":"Dual-Axis MEMS Micro-Mirror Based On Lithium Niobate Thin-Film","authors":"Yaoqing Lu, Kangfu Liu, Tao Wu","doi":"10.1109/IUS54386.2022.9958446","DOIUrl":null,"url":null,"abstract":"This work presents a novel piezoelectric actuated dual-axis micro-mirror using the Lithium Niobate (LiNbO<inf>3</inf>) thin-film on insulator (LNOI) platform. The performances of the proposed MEMS mirror are analyzed by the COMSOL 3D FEM simulation. Thanks to the strong e<inf>31</inf> and e<inf>33</inf> of LiNbO<inf>3</inf> thin film in specific orientations, which contribute to high effective piezoelectric constants e<inf>31</inf>,.f, the proposed dual-axis micro-mirror demonstrate high optical deflection angles in both of scanning modes. The design with LN ß = 123° demonstrates a high deflection of 23.5° for fast scan, which is 14.7× of AIN and 5.3× of Al<inf>0.7</inf>Sc<inf>0.3</inf>N. The simulation results show that the mirror based on LNOI comprehensively surpasses the design with aluminum nitride (AIN) or Sc-doped aluminum nitride (Al<inf>1-x</inf>Sc<inf>x</inf>N). This work demonstrates that LNOI is a promising platform for piezoelectric dual-axis MEMS mirrors.","PeriodicalId":272387,"journal":{"name":"2022 IEEE International Ultrasonics Symposium (IUS)","volume":"39 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-10-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 IEEE International Ultrasonics Symposium (IUS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IUS54386.2022.9958446","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
This work presents a novel piezoelectric actuated dual-axis micro-mirror using the Lithium Niobate (LiNbO3) thin-film on insulator (LNOI) platform. The performances of the proposed MEMS mirror are analyzed by the COMSOL 3D FEM simulation. Thanks to the strong e31 and e33 of LiNbO3 thin film in specific orientations, which contribute to high effective piezoelectric constants e31,.f, the proposed dual-axis micro-mirror demonstrate high optical deflection angles in both of scanning modes. The design with LN ß = 123° demonstrates a high deflection of 23.5° for fast scan, which is 14.7× of AIN and 5.3× of Al0.7Sc0.3N. The simulation results show that the mirror based on LNOI comprehensively surpasses the design with aluminum nitride (AIN) or Sc-doped aluminum nitride (Al1-xScxN). This work demonstrates that LNOI is a promising platform for piezoelectric dual-axis MEMS mirrors.
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