Rapid prototyping of refractive micro-optics using slab waveguide CO/sub 2/ lasers

Abstract

Summary form only given. This paper explores methods of improving the glass machining capabilities of sealed-off, pulsed RF, slab waveguide CO/sub 2/ lasers. Such devices offer a wide range of pulse durations (/spl tau//sub p/), pulse repetition frequencies (PRF's) and peak powers. In quartz and soda lime glass, the 10.6 /spl mu/m laser wavelength has an absorption depth of a few microns and a reflection coefficient of /spl sim/10%. This enables rapid prototyping of inexpensive refractive micro-optics with machining rates ranging from 10 to 50 /spl mu/m per shot. In a preliminary study, we successfully machined a cylindrical refractive micro-lens using a commercially available CO/sub 2/ slab waveguide laser.