Measurement of thickness and roughness using gwyddion

S. R. Yadhuraj, Satheesh Babu G, Uttara Kumari M
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引用次数: 6

Abstract

The measurement of thickness and roughness parameters are prime importance in thin film technologies and SPM (Scanning Probe Microscopy) based measurements. Unfortunately data processing is neglected compared to the importance given to the scanning of the data. Many inbuilt softwares are made available to the user which are complex and need expertise user. In this regards gwyddion provides the user friendly and open sources software available for data processing and statistical analysis of the sampled data obtained from SPM measurements. In this work the SPM data are obtained through the database and its morphologies and meteorology are studied using gwyddion software. The results obtained shows software could able to detect with the resolution of nanometers and the software can be used to measure the thickness and roughness measurements with reliable accuracy.
用圭迪翁测量厚度和粗糙度
厚度和粗糙度参数的测量在薄膜技术和基于SPM(扫描探针显微镜)的测量中是至关重要的。不幸的是,与重视数据扫描相比,数据处理被忽视了。许多内置的软件是复杂的,需要专业知识的用户可用。在这方面,gwyddion提供了用户友好的开源软件,可用于从SPM测量中获得的采样数据的数据处理和统计分析。本文通过数据库获取SPM数据,并利用gwyddion软件对SPM数据进行形态学和气象学研究。结果表明,该软件可实现纳米级的检测,并可用于测量厚度和粗糙度,具有可靠的精度。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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