Fabrication of micro and nano cantilevers review

2017 International Conference on Green Energy Conversion Systems (GECS) Pub Date : 2017-03-01 DOI:10.1109/GECS.2017.8066267

Amal Jamal Boukar, Mohamed Abdussalam Shawesh

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Abstract

In this review a detailed analysis of cantilever has been carried out, cantilevers are not more than a beam. Cantilevers are of various types; this classification is based on the connection of its both ends if it is connected from its one end while the other end is free to move then this type of cantilever is named as fixed-free cantilever. On the other hand if both ends are fixed then it is called fixed-fixed type of cantilevers. Numerous high resonant modes of cantilevers and its application in the field of science have been analyzed. An introduction to quantum dot concept and its incorporation to the cantilever have been shown and various applications of this technique are analyzed. A detailed overview of the fabrication process of the cantilever is discussed in this report. Fabrication of the micro and nano cantilevers has been discussed. The introduction to the quality factor of a cantilever is discussed to analyze the performance of a particular cantilever, a formula of quality factor has been shown and the effect of quality factor on the efficiency and rate of energy dissipation in a cantilever is analyzed.

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微纳米悬臂梁的制备综述

在这篇综述中，对悬臂梁进行了详细的分析，悬臂梁不多于一根梁。悬臂梁有多种类型;这种分类是基于其两端的连接，如果它的一端连接而另一端自由移动，则这种类型的悬臂称为固定自由悬臂。另一方面，如果两端固定，则称为固定-固定型悬臂梁。分析了悬臂梁的多种高谐振模态及其在科学领域的应用。介绍了量子点的概念及其与悬臂梁的结合，并分析了该技术的各种应用。本报告对悬臂梁的制造过程进行了详细的概述。讨论了微纳悬臂梁的制备方法。讨论了悬臂梁质量因子的介绍，分析了特定悬臂梁的性能，给出了质量因子的计算公式，并分析了质量因子对悬臂梁效率和耗能率的影响。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2017 International Conference on Green Energy Conversion Systems (GECS)

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