Characterization of thin Boron layers grown on Silicon utilizing molecular beam epitaxy for ultra-shallow pn-junctions

Abstract

Ultra-thin layers of Boron deposited on Silicon (100) by means of Molecular Beam Epitaxy are utilized to form highly blocking pn-junctions. Growth temperatures and thicknesses are investigated ranging 500°C to 700°C and 3nm to 5nm. Diodes realized with these layers display high ideality, low series resistance and high reverse blocking ability The consequent usage of these layers for realization of Insulated Gate Bipolar Transistors is also discussed.