{"title":"Application of energy-filtering TEM in contrast enhancement and elemental identification in IC failure analysis","authors":"W. Zhang, S. Ng, D. Cheong, S. Lim","doi":"10.1109/IPFA.2003.1222766","DOIUrl":null,"url":null,"abstract":"In this paper, application of EFTEM, combined with EDAX in STEM mode, is addressed to structural and chemical characterization in 0.25 /spl mu/m technology node.","PeriodicalId":266326,"journal":{"name":"Proceedings of the 10th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2003","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2003-07-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 10th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2003","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IPFA.2003.1222766","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
In this paper, application of EFTEM, combined with EDAX in STEM mode, is addressed to structural and chemical characterization in 0.25 /spl mu/m technology node.