Highly sensitive miniature needle PVDF-TrFE ultrasound sensor for optoacoustic microscopy

Yu-Hang Liu, A. Kurnikov, Weiye Li, P. Subochev, D. Razansky
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Abstract

. A wideband sensitive needle ultrasound sensor based on a polarized PVDF-TrFE copolymer piezoelectric film has been developed, which is capable of providing a noise equivalent pressure of 14 Pa and a uniform frequency response ranging from 1 to 25 MHz. Its high sensitivity (1.6 μ V ∕ Pa) and compact size were achieved by capitalizing on the large electromechanical coupling coefficient of PVDF-TrFE and minimizing parasitic capacitance in a two-stage amplifier structure. The detection sensitivity of the newly designed sensor outperformed commercially available hydrophones with an equivalent sensing element area by a factor of 9. The sensor has been successfully integrated into a light scanning optoacoustic microscopy (OAM) system with a limited working space. Submicrometer resolution images were subsequently attained from living mice without employing signal averaging. The miniature sensor design can readily be integrated into various OAM systems and further facilitate multimodal imaging system implementations.
用于光声显微镜的高灵敏度微型针PVDF-TrFE超声传感器
. 研制了一种基于极化PVDF-TrFE共聚物压电薄膜的宽带灵敏针式超声传感器,该传感器能够提供14 Pa的噪声等效压力和1 ~ 25 MHz的均匀频率响应。它的高灵敏度(1.6 μ V / Pa)和紧凑的尺寸是利用PVDF-TrFE的大机电耦合系数和最小的寄生电容在两级放大器结构中实现的。新设计的传感器的检测灵敏度比具有等效传感元件面积的市售水听器高出9倍。该传感器已成功集成到工作空间有限的光扫描光声显微镜(OAM)系统中。随后在不使用信号平均的情况下获得了活体小鼠的亚微米分辨率图像。微型传感器设计可以很容易地集成到各种OAM系统中,并进一步促进多模态成像系统的实现。
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