A Novel Microfabricated Formaldehyde Gas Sensor with NiO Thin Film

2005 Sensors for Industry Conference Pub Date : 2005-02-01 DOI:10.1109/SICON.2005.257859

Chia-Yen Lee, C. Chiang, Po-Cheng Chou, L. Fu, Che-Hsin Lin

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引用次数: 2

Abstract

This paper presents a novel microfabricated formaldehyde gas sensor with enhanced sensitivity and detection resolution capabilities. The device comprises a silica microstructure suspended at a small distance above a glass substrate. A sputtered NiO thin film is used as the formaldehyde sensing layer. The gas sensor incorporates Pt heating resistors integrated with a micro hotplate to provide a heating function and utilizes Au interdigitated electrodes. When formaldehyde is present in the atmosphere, it is adsorbed by the sensing layer and causes a change in the electrical conductivity of the NiO film. Therefore, the measured resistance between the interdigitated electrodes changes correspondingly. The application of a voltage to the Pt heaters causes the temperature of the micro hotplate to increase, which in turn enhances the sensitivity of the sensor. The nanometer scale grain size of the sputtered oxide thin film is conducive to improving the sensitivity of the gas sensor. The experimental results indicate that the developed device has a sensitivity of 10 ohm ppm-1 at 300degC and a detection capability of less than 1.0ppm

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一种新型NiO薄膜微加工甲醛气体传感器

本文提出了一种新型的微加工甲醛气体传感器，具有更高的灵敏度和检测分辨率。该装置包括悬浮在玻璃基板上方小距离处的二氧化硅微结构。采用溅射NiO薄膜作为甲醛感应层。该气体传感器将铂加热电阻与微热板集成在一起，以提供加热功能，并利用Au交叉电极。当甲醛存在于大气中时，它被感应层吸附，并引起NiO薄膜电导率的变化。因此，交叉电极之间的测量电阻也会相应变化。对铂加热器施加电压会使微热板的温度升高，从而提高传感器的灵敏度。溅射氧化薄膜的纳米级晶粒尺寸有利于提高气体传感器的灵敏度。实验结果表明，该装置在300℃时的灵敏度为10欧姆ppm-1，检测能力小于1.0ppm

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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2005 Sensors for Industry Conference

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