{"title":"Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors","authors":"T. Dinh, N. Nguyen, D. Dao","doi":"10.1007/978-981-13-2571-7","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":314451,"journal":{"name":"Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors","volume":"30 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1007/978-981-13-2571-7","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}