Temperature-Insensitive Polysilicon Mach-Zehnder Interferometer in Bulk CMOS

Abstract

We demonstrate a temperature-insensitive Mach-Zehnder interferometer (MZI) on the polysilicon gate of standard bulk CMOS platform and achieve a temperature sensitivity of ± 4 pm/°C over 60 nm wavelength range. Further fine tuning the temperature sensitivity is achieved by simply adjusting the strip waveguide length.