R&D of commercially manufactured large GEM foils

M. Posik, B. Surrow
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引用次数: 2

Abstract

Many experiments are currently using or proposing to use large area GEM foils in their detectors, which is creating a need for commercially available GEM foils. Currently CERN is the only main distributor of GEM foils, however with the growing interest in GEM technology keeping up with the increasing demand for GEM foils will be difficult. Thus the commercialization of GEM foils has been established by Tech-Etch Inc. of Plymouth, MA, USA using the single-mask technique, which is capable of producing GEM foils over a meter long. To date Tech-Etch has successfully manufactured 10 × 10 cm2 and 40 × 40 cm2 GEM foils. We will report on the electrical and geometrical properties, along with the inner and outer hole diameter size uniformity of these foils. Furthermore, Tech-Etch has now begun producing even larger GEM foils of 50 × 50 cm2, and are currently looking into how to accommodate GEM foils on the order of one meter long. The Tech-Etch foils were found to have excellent electrical properties. The measured mean optical properties were found to reflect the desired parameters and are consistent with those measured in double-mask GEM foils, as well as single-mask GEM foils produced at CERN. They also show good hole diameter uniformity over the active area.
商用大型GEM箔的研发
许多实验目前正在使用或建议在他们的探测器中使用大面积的GEM箔,这就产生了对市售GEM箔的需求。目前欧洲核子研究中心是唯一的主要分销商GEM箔,然而,随着对GEM技术的兴趣日益增长,跟上对GEM箔日益增长的需求将是困难的。因此,GEM箔的商业化已经由美国马萨诸塞州普利茅斯的Tech-Etch公司建立,该公司使用单掩膜技术,能够生产超过一米长的GEM箔。迄今为止,Tech-Etch已经成功制造了10 × 10 cm2和40 × 40 cm2的GEM箔。我们将报告电学和几何特性,以及这些箔的内外孔直径尺寸均匀性。此外,Tech-Etch现在已经开始生产更大的50 × 50平方厘米的GEM箔,目前正在研究如何容纳一米长的GEM箔。发现Tech-Etch箔具有优异的电性能。测量的平均光学性质反映了期望的参数,并且与在CERN生产的双掩膜GEM箔以及单掩膜GEM箔中测量的结果一致。它们在活动区域内也表现出良好的孔径均匀性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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