{"title":"High-performance integrated photonics platform utilizing ultra-low-loss silicon nitride process technology and its applications","authors":"Avi Feshali, W. Jin","doi":"10.1117/12.2663266","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":334092,"journal":{"name":"Optical Waveguide and Laser Sensors II","volume":"100 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-06-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Waveguide and Laser Sensors II","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2663266","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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