Tzu-Jung Kuo, Sin-Yun Lu, Wei-Xuan Chen, Yen-Chieh Wang, Y. Hung
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引用次数: 0
Abstract
We demonstrate a CMOS-compatible silicon multi-function optical circuit chip to drive an interferometric fiber optics gyroscope system. By employing short silicon micro-heaters as phase shifters, we achieved a compact footprint of 1.56 mm2 and a scale factor error of < 400 ppm.