Development and Research of the Design of a Thermal Sensor for Measuring the Temperature of the Substrate Processed in Vacuum-Plasma Processes

Abstract

Methods and devices used in the manufacture of electronic products for determining the thermal state of substrates are discussed. The methods were evaluated according to a number of criteria important for temperature measurements: performance, noise immunity, sensitivity, temperature range of measurements. Original devices and methods for measuring the operating temperature of substrates in vacuum-plasma processes have been developed.