High Performance Multilayer X-Ray Optics

Abstract

Multilayer x-ray optics are becoming increasingly important in diverse applications such as x-ray projection lithography1, x-ray laser cavities2, x-ray microscopy3, astronomy4 and spectroscopy5. In this paper we focus on the current development of normal incidence reflective optics for the soft x-ray spectrum of ~45 - 130 Å. The ultimate goal is to develop a soft x-ray imaging system capable of high throughput and diffraction-limited performance over an appropriate image field.