Sectional Trajectory Planning of Transmission Mechanism based on S-curve and Spline Curve

Abstract

Pecvd equipment is the key equipment for processing graphite boat by chemical vapor deposition. Due to the large mass of graphite boat, the transmission mechanism of equipment often encounters problems such as vibration and excessive loss during operation, which affects the efficiency. In this paper, taking the model of the ink boat transmission mechanism as the research object, a two-segment work path planning method determined according to the actual work needs is proposed. The adaptive s-curve method and the planning method based on B-spline curve curve are respectively used to plan the two segments of work path of the transmission mechanism, and the more complex spline curve path is optimized using the adaptive genetic algorithm; The performance of the trajectory planning method is verified by the trajectory simulation of the simplified transmission mechanism model; The control method based on fuzzy PID is designed to limit the control error within a reasonable range.