Integrated microring tuning in deep-trench bulk CMOS

Abstract

An all-digital ΔΣ-based heater driver and a 6-μm diameter microring resonator are monolithically-integrated in deep-trench bulk CMOS. With clock scaling and 2.5V supply voltage, the system demonstrates a 350GHz tuning range and 10-15μW/GHz tuning efficiencies.