M. Kumemura, K. Tamura, G. Hashiguchi, D. Collard, H. Fujita
{"title":"Nano-gap fabrication by focused ion beam for DNA trapping","authors":"M. Kumemura, K. Tamura, G. Hashiguchi, D. Collard, H. Fujita","doi":"10.1109/MMB.2006.251547","DOIUrl":null,"url":null,"abstract":"Micromachined tweezers is having nanometer sized gap was fabricated with a silicon etching method and a focussed ion beam technique. The gap of tweezer fabricated by this process was accomplished to be 15 nm-2 mum ranges. The validity of this tweezers was demonstrated by trapping DNA molecules. Trapping of bundle of lambda-DNA molecules between 100 mum gap was succeeded","PeriodicalId":170356,"journal":{"name":"2006 International Conference on Microtechnologies in Medicine and Biology","volume":"5 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-05-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 International Conference on Microtechnologies in Medicine and Biology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MMB.2006.251547","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Micromachined tweezers is having nanometer sized gap was fabricated with a silicon etching method and a focussed ion beam technique. The gap of tweezer fabricated by this process was accomplished to be 15 nm-2 mum ranges. The validity of this tweezers was demonstrated by trapping DNA molecules. Trapping of bundle of lambda-DNA molecules between 100 mum gap was succeeded