Bicmos LC-tank characterization and extraction of small signal equivalent circuit

Abstract

In this paper, a procedure for characterization and modeling of LC-tanks is proposed to enhance simulation accuracy in design of monolithic Voltage Controlled Oscillators (VCO). This efficient procedure is easy to implement combining robust design of G-S-G (Ground-Signal-Ground) test structures and accurate on-wafer characterizations, and it is in particular suitable for modeling of high frequency VCOs fabricated in advanced CMOS and BiCMOS technologies. The methodology allows the extraction of LC-tank capacitors including all RLC-tank parasitics and therefore features an important increase of modeling accuracy. The method has been validated in the case of several LC-tanks (oscillating between 6 and 10GHz). The tank inductors and capacitors have been characterized on-wafer up to 50GHz.