A Micromachined Tunable Cavity Resonator

2003 33rd European Microwave Conference, 2003 Pub Date : 2003-10-23 DOI:10.1109/EUMA.2003.341043

D. Mercier, M. Chatras, J. Orlianges, C. Champeaux, A. Catherinot, P. Blondy, D. Cros, J. Papapolymerou

引用次数: 12

Abstract

This paper focuses on a tunable resonator fabricated using bulk and surface micro-machining techniques. The resonator consists of a silicon micro-machined metalized cavity coupled with a MEMS bridge capacitor for tunability purposes. The resonator is excited using coplanar waveguide lines to avoid losses from transitions and facilitate measurements. The unloaded quality factor of the device is about 150 depending on the MEMS varactor position and the simulated tuning range is 0.4 GHz (1.45%) at 27.8 GHz.

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微机械可调谐腔谐振器

本文研究了一种采用体微加工和表面微加工技术制备的可调谐谐振器。该谐振器由硅微机械金属化腔和MEMS桥电容组成，用于可调谐。谐振腔采用共面波导激励，避免了跃迁造成的损耗，便于测量。根据MEMS变容管位置的不同，器件的空载质量因子约为150，在27.8 GHz时的模拟调谐范围为0.4 GHz(1.45%)。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2003 33rd European Microwave Conference, 2003

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