Complex Imaging Reflectometry for Dopant Profile Measurements using Tabletop High Harmonic Light

M. Tanksalvala, Christina L. Porter, Yuka Esashi, Galen P. Miley, N. Horiguchi, Robert M. Karl, Peter C Johnsen, C. Bevis, N. Jenkins, Bin Wang, Xiaoshi Zhang, S. Cousin, D. Adams, M. Gerrity, H. Kapteyn, M. Murnane
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引用次数: 0

Abstract

We present a tabletop-scale complex-imaging EUV reflectometer that uses grazing- incidence ptychographic imaging to non-destructively determine depth-dependent, spatially-resolved composition with high sensitivity to chemical makeup, thin film layer thickness, interface quality and dopant profiles.
使用桌面高谐波光测量掺杂物轮廓的复杂成像反射法
我们提出了一种桌面尺度的复杂成像EUV反射仪,它使用掠入射型成像来非破坏性地确定深度依赖、空间分辨的成分,对化学成分、薄膜层厚度、界面质量和掺杂物剖面具有高灵敏度。
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