Polynomial control technique for adaptive positioning within sub-micrometer scale

Abstract

This paper describes an experimental approach to the positioning of a MEMS production system with a nano - scale resolution. Presented production system works on the basis of friction based piezo electric motors, which are being very hard for modeling. It is even being hard to describe this motors using classical mathematical functions, or to define them using other well known control procedures. Sophisticated control techniques are often required for successful positioning of such systems. In our work we present a simple control technique based on experimental results and polynomial equations. Presented polynomial control technique fulfils demands for positioning in sub-micrometer scale. Theory and practical results of proposed control technique are given within this paper.