B. Zat’ko, F. Dubecký, K. Sedlačková, A. Šagátová, P. Boháček, M. Sekáčová, V. Nečas
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引用次数: 0
Abstract
The 4H polytype SiC is a promising material for radiation-resistant sensors of ionizing particles. In this work we focused on the analysis of active region thickness of detectors based on 4H-SiC. The detectors investigated are fabricated from a 105 μm epitaxial layer grown on 350 μm 4H-SiC substrate. The circular Schottky contacts with diameter of 1.4 mm using an Au/Ni double layer were evaporated onto both sides of the detector material. The capacitance-voltage measurements allowed us to estimate free carrier concentration profile. The second method consists of measuring detection efficiency of γ-rays at reverse bias voltages up to 500 V.