Carbon diamond-like film in GaAs MDS-structures

11th International Conference 'Microwave and Telecommunication Technology'. Conference Proceedings (IEEE Cat. No.01EX487) Pub Date : 2001-09-10 DOI:10.1109/CRMICO.2001.961630

N. I. Beletsky, N. Polyansky, A. Mishnyov

引用次数: 0

Abstract

MDS-structures on basis of gallium-arsenide (GaAs) and carbon diamond-like film (CDLF) are experimentally investigated. The attempt is made to estimate influence of CDLF quality on volt-ampere characteristics of MDS-structures by use laser irradiation for improvement of CDLF quality.

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砷化镓mds结构中的类碳金刚石膜

实验研究了基于砷化镓(GaAs)和类碳金刚石膜(CDLF)的mds结构。为了提高CDLF质量，尝试用激光照射的方法评估CDLF质量对mds结构伏安特性的影响。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

11th International Conference 'Microwave and Telecommunication Technology'. Conference Proceedings (IEEE Cat. No.01EX487)

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