Optimization and thermal characterization of uniform micropillar based silicon evaporator in advanced vapor chambers

2016 15th IEEE Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (ITherm) Pub Date : 2016-05-01 DOI:10.1109/ITHERM.2016.7517658

Mengyao Wei, B. He, S. Somasundaram, C. S. Tan, E. Wang

{"title":"Optimization and thermal characterization of uniform micropillar based silicon evaporator in advanced vapor chambers","authors":"Mengyao Wei, B. He, S. Somasundaram, C. S. Tan, E. Wang","doi":"10.1109/ITHERM.2016.7517658","DOIUrl":null,"url":null,"abstract":"Micropillar based wicks were widely studied in recent years. They were proven to be promising candidates for evaporators inside vapor chambers as they possess advantages of high capillary pressure, permeability, large areas for thin film evaporation and easy-controlled fabrication processes. In this work, optimization of uniform evaporator with cylindrical silicon micropillars are conducted with Brinkman's equation derived model. Sample with optimized geometries is designed, fabricated and thermally tested inside a vacuum chamber. Theoretically, the best combination of micropillar geometries are d= 20.7 μm, h=l=36.3 μm. The calculated heat flux for optimized evaporator is q\"=93.5 W/cm2 at superheat of 15 °C. Measured maximum heat flux of the actual sample is q\"= 80.6 W/cm2 at 13.2 °C superheat due to deviation in pillar height. The model is proven to have good correlation with preliminary experimental results.","PeriodicalId":426908,"journal":{"name":"2016 15th IEEE Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (ITherm)","volume":"2000 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 15th IEEE Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (ITherm)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ITHERM.2016.7517658","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 7

Abstract

Micropillar based wicks were widely studied in recent years. They were proven to be promising candidates for evaporators inside vapor chambers as they possess advantages of high capillary pressure, permeability, large areas for thin film evaporation and easy-controlled fabrication processes. In this work, optimization of uniform evaporator with cylindrical silicon micropillars are conducted with Brinkman's equation derived model. Sample with optimized geometries is designed, fabricated and thermally tested inside a vacuum chamber. Theoretically, the best combination of micropillar geometries are d= 20.7 μm, h=l=36.3 μm. The calculated heat flux for optimized evaporator is q"=93.5 W/cm2 at superheat of 15 °C. Measured maximum heat flux of the actual sample is q"= 80.6 W/cm2 at 13.2 °C superheat due to deviation in pillar height. The model is proven to have good correlation with preliminary experimental results.

查看原文本刊更多论文

先进蒸汽室中均匀微柱基硅蒸发器的优化及热特性研究

近年来，微柱灯芯得到了广泛的研究。由于具有毛细管压力高、渗透性好、薄膜蒸发面积大、制造工艺易于控制等优点，被证明是蒸汽室内蒸发器的理想选择。本文采用Brinkman方程推导模型对硅微柱均匀蒸发器进行了优化设计。具有优化几何形状的样品在真空室中设计，制造和热测试。理论上，d= 20.7 μm, h=l=36.3 μm为微柱几何形状的最佳组合。在过热度为15℃时，优化蒸发器的计算热流密度为q"=93.5 W/cm2。在13.2°C过热时，由于柱高偏差，实际样品测得的最大热流密度为q"= 80.6 W/cm2。该模型与初步实验结果具有较好的相关性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

求助全文

约1分钟内获得全文求助全文

来源期刊

2016 15th IEEE Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (ITherm)

自引率

0.00%

发文量