Scanner test pattern for evaluation of beam manipulation accuracy

Abstract

Galvanometric laser scanners are used in various laser processing methods to create the beam movements on the workpiece. State of art applications and high speed manufacturing and processing requires often good performance in addition to the high accuracy demands. In laser scanner system, the performance is limited by optical, mechanical and control related restrictions. These limitations can be measured one by one. The errors in the scanner are however a combination of all three causes. Due to these facts, a direct measurement system for scanner accuracy evaluation does not exist. For these reasons a test pattern has been developed for indirect scanner system accuracy and performance evaluation.