Design and analysis of RF MEMS Varactor for extended tuning range

Abstract

Electrostatically actuated parallel plate MEMS Varactor is a low power, highly sensitive and robust device. Simple parallel plate Varactor structure possesses a maximum tuning range of 1.5:1 after which the plates start collapsing. In the present paper we have employed different Varactor designs for extended tuning range. The major effort is done to develop a Varactor that can achieve tuning range greater than 1.5. The design and analysis is carried out on COMSOL Multiphysics simulation tool in accordance with standard POLYMUMP'S process.