Characterization of Thin Zirconia Films Deposited by ECD on ITO Coated Glass for Biosensing Applications

Abstract

This work explores the feasibility of electrochemical deposition (ECD) of zirconia on ITO coated glass. The thickness and morphology of the zirconia layers are very much affected by the process conditions such as temperature, working electrode potential, current density, deposition time and properties of the solvent. The effect of these factors on the quality of the layers formed has been considered in detail in this paper. Zirconia films (ZrO2) of different thickness have been deposited electrochemically on ITO coated glass. Experiments have been carried out in aqueous and non-aqueous electrolyte solution of zirconium tetra chloride (ZrCl4) at different temperatures. The thickness of the deposited layers varied within the range of 35–256 nm. The formation of stoichiometric layer of ZrO2 has been confirmed by X-ray diffraction and SEM results.