FEM simulation of piezoresistive pressure module

2009 International School and Seminar on Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies Pub Date : 2009-11-13 DOI:10.1109/INTERNANO.2009.5335638

V. Gridchin, M. A. Chebanov

引用次数: 1

Abstract

The impact of singularity points on stress distribution in piezoresistive module is investigated by means of FEM simulation. Strong influence of singularities on stress distribution in silicon-glass interface is presented in this paper.

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压阻式压力模块的有限元仿真

采用有限元模拟方法研究了压阻式模组中奇异点对应力分布的影响。本文提出了奇点对硅-玻璃界面应力分布的强烈影响。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2009 International School and Seminar on Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies

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