Frequency analysis of integrated micromachined inductive microphone

Abstract

This paper is focused on frequency analysis of integrated micromachined inductive microphone. It is a very important step in the conception of integrated sensors. The concept of this new structure is based on the variation of mutual inductance between an external fixed inductor and an internal suspended inductor. The internal inductor is fabricated on top of a suspended membrane. Our goal is to increase the resonant frequencies of the suspended structure. We propose a new model of a membrane to the monolithic CMOS integrated inductive microphone. We studied the dynamic response. The choice of the new model is derived and discussed. The frequencies and the associated mode shapes determined by finite element analysis using SOLIDWORKS and COSMOSWORKS with technology AMS 0.8 /spl mu/m, are described. The purpose is to demonstrate a sensibility of the microphone.