System modeling and robust design of microaccelerometer using piezoelectric thin film

Abstract

This paper starts from the structure analysis and system modeling of piezoelectric microaccelerometer using piezoelectric thin film. The simulation model demonstrates the interaction of structure variables, piezoelectric material parameters and amplification circuit design to the sensor performance. However, manufacturing error results in the variations of design variables, which has significant effects on sensor accuracy. The proposed system model is applied to the parameter design of microaccelerometer. The paper conducts the design optimization and robustness analysis using Taguchi's method to reduce the sensitivity of the sensor response to the dimensional errors and variations of material properties. A FEM study is applied to verify the theoretical model and design improvement.