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Model of silicon piezoresistive pressure sensor

Proceedings of X All-Russian Scientific Conference "System Synthesis and Applied Synergetics" Pub Date : 2021-10-10 DOI:10.18522/syssyn-2021-44
M.E. Drobynin, A. Nikiforov, P. A. Lvov, A. A. Lvov, M. S. Svetlov, E. A. Filina
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硅压阻式压力传感器模型
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Proceedings of X All-Russian Scientific Conference "System Synthesis and Applied Synergetics"
Proceedings of X All-Russian Scientific Conference "System Synthesis and Applied Synergetics"
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