A novel DMTL MEMS phase shifter

Abstract

This paper results for one bit DMTL phase shifter that are designed to operate from 8-32GHz on high resistivity silicon. The periodically loaded capacitor used 4 MEMS bridges that suspended on CPW transmission line. Actuation voltage is applied between bridge and CPW transmission line. The phase shifter result in a insertion loss/return loss is better than -1.0dB/-15dB from 10.5 to 30 GHz and phase shifts of 21.1/spl deg/ at 15 GHz, and 44.3/spl deg/ at 30 GHz.