Structure design optimization of micro/nano angular-table with S-shape compliant structure

Abstract

Micro-electromechanical Systems is a rapidly growing field that will permeate our everyday lives in the coming decades. Recently, the evolution in microelectronics of combining mechanical and electrical functions has brought about an exciting new field micro/nano-electro-mechanical system. Compliant mechanisms can play an important role in the design of micro-devices for micro-electro-mechanical systems applications. Compliant mechanism is flexible structures that generate desired motion by undergoing elastic deformations. The concept of structural optimization has been more and more widely accepted in many engineering fields. The structural optimization can result in a much more reasonable and economical structure design. In this investigation, structure optimization is applied for designing two-dimensional micro/nano angular-table compliant mechanism. The interface between Malab and Ansys were shown to obtain the optimal shape of the compliant mechanism. Structure design optimization of the two-dimension micro/nano angular-table with S-shape compliant structure was shown and all results are illustrated.