Precise and Flexible Modeling for Semiconductor Wafer Fabrication

Abstract

For efficient planning and planning and management of a semiconductor manufacturing line, such line performances as turnaround time and throughput have to be evaluated precisely. We have developed a simulation system, "SEMALIS", to handle complicated lot processing and equipment failures. This paper describes this line model, evaluates and analyzes its performance when using special lot processing, such as continuous processing, time-critical express lot processing, and some line operations for efficient lot processing.