Atomic force microscopy electrostatic nanolithography (AFMEN): a versatile tool for nano-patterning in thin films and beyond

Abstract

A variety of materials can be used for the AFMEN including exfoliated graphene, Si (100) treated with solvents, polymer films, and styrene butadiene rubber. This simple one-two stage approach is a tool to pattern almost any semiconductor or dielectric surface at the nanoscale.