S. Orihara, Takuro Taniguchi, K. Nomoto, Y. Nawaki, K. Tsuruoka
{"title":"High precision grating of waveguide combiner with scanning overlapped phase interference lithography","authors":"S. Orihara, Takuro Taniguchi, K. Nomoto, Y. Nawaki, K. Tsuruoka","doi":"10.1117/12.2668617","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":265682,"journal":{"name":"Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) IV","volume":"54 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) IV","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2668617","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}