Mid-low energy implantation tilt angle monitoring with photomodulated reflectance measurement

Abstract

Photo-modulated Reflectivity Measurement (PMR) is an excellent technology for ion implantation dose and tilt angle monitoring of as-implanted pre-annealed production wafers. The SEMILAB PMR-3000 is a unit for in-line monitoring of ion implantation prior to the thermal annealing process step. The enhanced optical system ensures accurate measurement over the whole dose range without insensitive regions in the mid-dose range. Typical dose detectability is <0.5% (1 σ). The resolution of tilt angle detection can reach 0.1° (1 σ). This sensitivity to tilt angle fulfills the requirements of state of the art process control requirements.