Si Nanowire Biosensors Using a FinFET Fabrication Process for Real Time Monitoring Cellular Ion Actitivies

Qingzhu Zhang, H. Tu, H. Yin, F. Wei, Hongbin Zhao, Chunling Xue, Qianhui Wei, Zhaohao Zhang, Xiao Zhang, Shaoming Zhang, Q. Han, Yudong Li, R. Zhao, Jiang Yan, Junfeng Li, Wenwu Wang
{"title":"Si Nanowire Biosensors Using a FinFET Fabrication Process for Real Time Monitoring Cellular Ion Actitivies","authors":"Qingzhu Zhang, H. Tu, H. Yin, F. Wei, Hongbin Zhao, Chunling Xue, Qianhui Wei, Zhaohao Zhang, Xiao Zhang, Shaoming Zhang, Q. Han, Yudong Li, R. Zhao, Jiang Yan, Junfeng Li, Wenwu Wang","doi":"10.1109/IEDM.2018.8614649","DOIUrl":null,"url":null,"abstract":"In this paper, a biocompatible biosensor based on horizontal Si nanowire (NW) array field-effect transistor (FET) has been fabricated by the feasible spacer image transfer (SIT) process. The Si NW FET as biosensor is proposed for the realtime cellular Ca2+ monitoring for mesenchymal stem cells (MSCs), which presents fast-responded and high-sensitive characteristics. Compared with the conventional sensing techniques, the Si NW biosensor exhibits non-invasive, biocompatible and reliable advantages. This will help us to further understand the mechanism of cellular ion activities and provides a promising method for the cell-level diagnose and therapy.","PeriodicalId":152963,"journal":{"name":"2018 IEEE International Electron Devices Meeting (IEDM)","volume":"5 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"12","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 IEEE International Electron Devices Meeting (IEDM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IEDM.2018.8614649","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 12

Abstract

In this paper, a biocompatible biosensor based on horizontal Si nanowire (NW) array field-effect transistor (FET) has been fabricated by the feasible spacer image transfer (SIT) process. The Si NW FET as biosensor is proposed for the realtime cellular Ca2+ monitoring for mesenchymal stem cells (MSCs), which presents fast-responded and high-sensitive characteristics. Compared with the conventional sensing techniques, the Si NW biosensor exhibits non-invasive, biocompatible and reliable advantages. This will help us to further understand the mechanism of cellular ion activities and provides a promising method for the cell-level diagnose and therapy.
利用FinFET制造工艺实时监测细胞离子活性的硅纳米线生物传感器
本文采用可行间隔图像传输(SIT)工艺,制备了一种基于水平硅纳米线阵列场效应晶体管(FET)的生物相容性生物传感器。Si NW场效应晶体管作为生物传感器用于间充质干细胞(mesenchymal stem cells, MSCs)细胞Ca2+的实时监测,具有快速响应和高灵敏度的特点。与传统传感技术相比,Si NW生物传感器具有非侵入性、生物相容性和可靠性等优点。这将有助于我们进一步了解细胞离子活动的机制,并为细胞水平的诊断和治疗提供一种有希望的方法。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 求助全文
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信