Application of modern image analysis to quantify dispenser cathode surface condition

Abstract

Summary form only given. One of the primary in-process failure modes for guns in vacuum electron devices (VEDs) is poor or low emission due to smearing the cathode pores closed during the fabrication process. The most widely accepted method for verification of open pores, pore size, and distribution is the scanning electron microscope (SEM). However, visual interpretation of the SEM image is still required. A program was launched to evaluate a non-contact, high throughput, optical inspection system that can be utilized to inspect and quantify the dispenser cathode surface porosity or open surface condition by an image analysis application. This presentation summarizes the results of this project.