Free-standing Al/sub 0.30/Ga/sub 0.70/As thermopile infrared sensor

Abstract

Bolometric infrared sensors using integrated thermoelements for temperature detection and membrane structures for thermal isolation of the absorber are passive devices for highly sensitive remote temperature measurements. With the typical broad banded response to infrared radiation this device has a wide area of applications. We used the GaAs/AlGaAs material system for this purpose as its material parameters show advantages in terms of sensor performance and technology.