Structure and phase formation of ion-plasma vacuum-arc Zr-B-Si-C-Ti-(N) coatings during deposition

Abstract

Zr-B-Si-C-Ti-N and Zr-B-Si-C-Ti coating systems were produced by arc-PVD technique. For their deposition, a combined titanium cathode with a ZrB2-SiC insert was used. Deposition was carried out in a residual atmosphere of N2 and Ar. Coatings structure and composition were investigated. The Zr-B-Si-C-Ti coating is characterized by an amorphous-nanocrystalline structure. In this case, nanocrystallites were formed from complex (Zr, Ti) C, and the amorphous structure fraction is formed mainly by phases based on zirconium and silicon. The second system, deposited in a nitrogen residual atmosphere, Zr-B-Si-C-Ti-N, has a predominantly amorphous structure. Such a structure is formed mainly from borides, nitrides, carbides and complex compounds of zirconium, silicon and titanium.